Our PRODUCTS -- CFW Automation Sendirian Berhad
High-Grade Mass Flow Meter
Model 3200 SeiresModel 3200 Series Mass Flow Controller is an advanced model designed as a successor of the 3910 series that enjoys a wide use for diverse applications such as manufacture of semiconductors, LCDs, combustion equipment, analytical devices, and biotechnology fields. Its high performance is equal to a new standard of KOFLOC
Features
- Equipped with a temperature follow up type current difference detection flow snesor (patent applied for) to ensure high accuracy and high-speed response
- Use of a normally closed valve to ensure safety
- Reduced dead volume thanks to the diaphragm seat valve
- Control of small quantities of flows available up to 1 SCCM full scale (SR option)
- Low differential pressure type control available for cimbustible gases (LP option)
Standard Specifications
NoteSpecification relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.
Hardness Layout
Pin Assignment of Dsub 9-pin Connector per KFC Standard| Pin no | Signal |
| 1 | Input valve open/close operation |
| 2 | Flow output 0-5V |
| 3 | +15 VDC Power source |
| 4 | Power source COM |
| 5 | -15 VDC Power source |
| 6 | Flow input HI |
| 7 | Flow output COM |
| 8 | Flow input Lo |
| 9 | NC |
Dimension
ORDERING
* Refer to "Ordering" and "Illustative example" when placing an order or requesting a quotation. Fill in the blanks in the "Order/Quotation Request Card" at the end of he catalog, and send the card by fax.